3D skener 3D profilometer

Keyence VR-5200 mit VR-5000

Keyence
Model: VR-5200
Type: Measuring Head
Light Sources
Observation light source: LED ring light (red, blue, green)
Measurement light source: White LED
Controller: VR-5000
Observation and Measurement Range
Macro Mode
Magnification (based on a 15-inch monitor) 12×:
Horizontal 24.0 mm
Vertical 18.0 mm
Magnification (based on a 15-inch monitor) 25×:
Horizontal 12.0 mm
Vertical 9.0 mm
Magnification (based on a 15-inch monitor) 38×:
Horizontal 8.0 mm
Vertical 6.0 mm
Magnification (based on a 15-inch monitor) 50×:
Horizontal 6.0 mm
Vertical 4.5 mm
Micro Mode
Magnification (based on a 15-inch monitor) 40×:
Horizontal 7.6 mm
Vertical 5.7 mm
Magnification (based on a 15-inch monitor) 80×:
Horizontal 3.8 mm
Vertical 2.9 mm
Magnification (based on a 15-inch monitor) 120×:
Horizontal 2.5 mm
Vertical 1.9 mm
Magnification (based on a 15-inch monitor) 160×:
Horizontal 1.9 mm
Vertical 1.4 mm
Zoom 1× to 4×
Height Measurement
Measuring resolution 0.1 µm
Height measurement range
Without image composition in Z
Macro mode: 10 mm
Micro mode: 1 mm
With image composition in Z
Macro mode: 50 mm
Micro mode: 30 mm
Repeatability (σ)
Without image composition in Z
0.4 µm
With image composition in Z
1.0 µm
Measuring accuracy
Without image composition in Z
±2.5 µm
With image composition in Z
±4.0 µm
Width Measurement
Repeatability (σ)
Macro mode: 1 µm
Micro mode: 0.5 µm
Measuring accuracy
Macro mode: ±5 µm
Micro mode: ±2 µm
Image Composition
Fully automatic measurement (automatic XY control + automatic Z focus),
automatic mapping, automatic area setup
Measurable XY range
206 x 104 mm
Object stage
XY travel range 184 × 88 mm (motorized)
Z travel range 73 mm (motorized)
Load capacity 4.5 kg
Working distance 75 mm
Image sensor
4-megapixel CMOS, B/W
Transmitter lens
Double telecentric lens x 2
Receiver lens
Double telecentric lens
Data processing
Dedicated PC as per KEYENCE specifications (Operating system: Windows 11 Pro)
Power Supply
Voltage 100 to 240 V AC, 50/60 Hz
Power consumption Max. 200 VA
Environmental resistance
Ambient temperature 15 to 30°C
Relative humidity 20 to 80% RH (non-condensing)
Weight approx. 28 kg (Net weight of measuring unit approx. 11 kg)
Object Table Extension
Observation software VR-5000 Version 3.3.5.75
Knedpfx Ahewc Sxde Dsc
Image Composition Module VR-H3J
Creates a single large image from a series of images captured with the observation software. Color images are displayed.
Analysis Extension Module VR-H3CA
Expands the functions of the analysis software. Allows measurement comparison and 3D CAD measurement comparison.
Condition: Used
Scope of delivery: (as pictured)
(Subject to change and errors in the technical data, information is provided without guarantee!)
If you have any further questions, feel free to contact us by phone.

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