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ULVAC Model LR600

Here we offer a ULVAC dry vacuum pump.
ULVAC Dry Vacuum Pump
Solution for demanding process pump applications
Dry Vacuum Pump
ULVAC's unique approach to utilizing latent heat within the pump body enables the LR / HR / UR series to deliver performance even under the most stringent process conditions.
ULVAC has focused its design efforts on maintaining extremely uniform high temperatures across all pump stages and has optimized this pump series for CVD and etching applications.
Compatible with ULVAC's ECO-SHOCK system for additional energy savings
Features
The LR-series pump is designed for load lock chambers and PVD processes.
ULVAC's unique aluminum design enables very even temperature distribution throughout the pump body:
The ULVAC LR-series pump is specifically intended for applications that require a heated pump, heated gas lines, and/or heated exhaust lines
Excellent helium pumping performance
Canned motor for safety and easy maintenance
Withstands power interruptions of up to 500 ms.
Internal components are specially treated to ensure a high level of surface hardness and excellent corrosion resistance.
Bsded R U Etspfx Afnswi
This prevents wear of internal pump parts when exposed to corrosive gases.
(LR Series)
Designed for process gases generating powdery by-products, such as Si crystal growth furnaces
Forepump for turbomolecular and mechanical booster pumps
Type: LR600
Condition: new
Scope of delivery: (See image)
(Specifications are subject to change and errors excepted!)
If you have any further questions, we are happy to answer them by phone.

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