Sistem za površinsko metrologijo

FRT MicroProf MPR 1250

Fries Research & Technology
Device designation: FRT MicroProf® MPR 1250
The FRT MicroProf® MPR 1250 is a high-precision surface measurement system from the MicroProf® series by Fries Research & Technology GmbH (FRT).
These systems are designed for non-destructive and contactless analysis of surface parameters such as topography, roughness, layer thickness, and more.

Features of the FRT MicroProf:
Device details:
Model: FRT MicroProf® MPR1250
Article number: 200 00
Sensor type: CWL 300 µm
Serial number: 0904001
Measurement principle: chromatic-confocal point sensor
Light source: halogen lamp, white light
Vertical resolution: up to 3 nm
Measurement accuracy (Z): 100 nm
Lateral resolution (XY): 2.5 µm
Measurement angle to surface: 90° ±30°
Max. sample size: approx. 310 x 310 x 50 mm

Technical data (excerpt):
XY table:
Type: compact XY-cross table
Travel/measurement range: 200 x 200 mm
Bearings: mechanical crossed roller guide
Drive: DC motor with ball screw
Position measuring system: Heidenhain glass scale with reference mark
Measuring system resolution: 0.2 µm
Repeatability: < ±1 µm
Squareness XY: < 4 µm / 200 mm
Z-axis runout (per axis): < 2 µm / 200 mm

Z-axis (motorized):
Type: linear axis
Travel: 50 mm (optionally 100 mm)
Drive: stepper motor with spindle drive
Side runout: < 2 µm / 50 mm

Manual coarse adjustment (optional):
Type: dovetail guide
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Adjustment range: up to 300 mm sample height

Measurement:
Minimum point spacing (XY): 0.6 µm
Sample size: approx. 310 x 310 x 50 mm
Max. sample weight: 5 kg (optional 10 kg)
Measuring speed: 1 µm/s up to max. 100 mm/s

System:
Total weight: approx. 275 kg (measuring unit: 225 kg)
Footprint measuring unit: approx. 0.9 x 0.8 m
Dimensions control unit (W x D x H): approx. 0.55 x 0.53 x 0.32 m
Power supply (EU/US): 110–240 V, 50–60 Hz, 16 A
Power consumption: approx. 300–400 W

Operating conditions:
Temperature range: 22°C ±5°C
Temperature stability: < 0.5°C
Weight approx. 500 kg

Condition:
The device is in very good technical and optical condition.
All axes move precisely and smoothly.

Scope of delivery:
MicroProf® MPR200 00 XY measurement system
Control unit
Connection cables
(Specifications subject to change and error!)
Inspection & testing on site by appointment possible.
For further questions, please feel free to contact us by phone.

Oglas je bil preveden samodejno, zaradi česar je morda prišlo do napak pri prevodu.