Sprednji modul za rezine 300 mmBROOKS ASYST
Spartan EFEM Sorter
Sprednji modul za rezine 300 mm
BROOKS ASYST
Spartan EFEM Sorter
Stalna cena brez DDV
59.750 €
Leto izdelave
2010
Stanje
Rabljeno
Lokacija
Dresden 

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Podatki o stroju
- Opis stroja:
- Sprednji modul za rezine 300 mm
- Proizvajalec:
- BROOKS ASYST
- Model:
- Spartan EFEM Sorter
- Leto izdelave:
- 2010
- Stanje:
- rabljeno
Cena in lokacija
Stalna cena brez DDV
59.750 €
- Lokacija:
- Heilbronner Str. 22, 01189 Dresden, Deutschland

Klic
Podrobnosti ponudbe
- ID ponudbe:
- A20798077
- Št. reference:
- LW43278
- Nazadnje posodobljeno:
- dne 19.12.2025
Opis
Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter
Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used
Technical Data:
100-240V AC
50/60Hz
10A
General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot
This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controllers, as well as all necessary interfaces for system integration.
In addition, a fully integrated wafer transfer robot is installed, which removes wafers from the FOUP/cassette load ports, separates them, and precisely hands them off to downstream process modules.
Iijdox I Ax Sjpfx Ah Ajk
Year of manufacture: 27.12.2010
Includes CD with operation, service, and installation manuals (9701-3060-01 Rev G)
Oglas je bil preveden samodejno, zaradi česar je morda prišlo do napak pri prevodu.
Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used
Technical Data:
100-240V AC
50/60Hz
10A
General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot
This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controllers, as well as all necessary interfaces for system integration.
In addition, a fully integrated wafer transfer robot is installed, which removes wafers from the FOUP/cassette load ports, separates them, and precisely hands them off to downstream process modules.
Iijdox I Ax Sjpfx Ah Ajk
Year of manufacture: 27.12.2010
Includes CD with operation, service, and installation manuals (9701-3060-01 Rev G)
Oglas je bil preveden samodejno, zaradi česar je morda prišlo do napak pri prevodu.
Ponudnik
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Registriran od: 2014
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