Sprednji modul za rezine 300 mm

BROOKS ASYST Spartan EFEM Sorter

Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter

Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used

Cgodox I Ax Sspfx Afnep
Technical Data:
100-240V AC
50/60Hz
10A

General:
300-mm EFEM with 3 load ports, cleanroom mini-environment, and integrated wafer transfer robot

This unit is an Equipment Front End Module (EFEM) from the ASYST Spartan series, designed for fully automated handling of 300 mm silicon wafers in semiconductor manufacturing.
It features three load ports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controllers, as well as all necessary interfaces for system integration.
In addition, a fully integrated wafer transfer robot is installed, which removes wafers from the FOUP/cassette load ports, separates them, and precisely hands them off to downstream process modules.

Year of manufacture: 27.12.2010
Includes CD with operation, service, and installation manuals (9701-3060-01 Rev G)

Oglas je bil avtomatsko preveden. Možne so napake pri prevodu.