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Bobst Group SA Roll-To-Roll Sputtering

Sputtering System GVE/Optilab: Roll-to-roll system for depositing ultra-thin films (in the nanometer range). The system is capable of depositing various materials (metals, transparent conductive layers) onto foil substrates. It is equipped with multiple sputtering cathodes, meaning several thin films can be deposited simultaneously.

GVE, Bobst Ltd, Optilab, 2010. Vacuum roll-to-roll sputtering tool with 3 deposition chambers, each accommodating 2 cathodes. Complete with:
- 520 mm web width, bi-directional winding with interleaving and de-interleaving functionality
- Turbo molecular pumping (mag lev) in all zones
- Drum chiller, reheat unit (from -20°C to +200°C)
- 1100 polycold unit with cryo coils in each sputter zone as well as in the winding zone
- GVE AC medium frequency plasma unit
- Post-coating resistance monitoring system (measuring resistance along the web centerline)
- Siemens WIN CC touch panel system for machine control and monitoring
- IR heating zone (3 heating units)
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- Web biasing system (including PSU)
- 1 generator, magnetron with 2 x 20 kW pulsed DC
- 1 dual magnetron with 2 x 10 kW pulsed DC (with hidden anode)
- MFCs, etc.
- 1 fully integrated PEM sputter control system

Original price: EUR 1,450,000.

Oglas je bil preveden samodejno, zaradi česar je morda prišlo do napak pri prevodu.