Alcatel Adixen AD100K visoki vakuum

Alcatel Adixen AD100K AD30K 600-4500 m3/h.

Adixen AD30K Dry Pump, High Vacuum
The new high-performance dry-running pumps:
The ADH series is specifically designed for solar applications and developed for the demanding processes found in the semiconductor and LED industries, featuring a pumping speed of 600-4500 m³/h.

Semiconductor: High H2 pumping rate
The performance of the ADH series offers the following process advantages:
- ADL process performance: high pumping efficiency of light gases enables faster chamber evacuation between process steps
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- Epitaxy and EUV: high suction capacity and flow rate tolerance meet the most demanding process specifications

Adixen AD30K Dry Pump, High Vacuum, AD 30 KL
Manufacturer: Alcatel Adixen
Model: AD30K.H
Year of manufacture: 2008

Adixen AD100K.H
Manufacturer: Alcatel Adixen
Model: AD100K.H
Year of manufacture: 2008

Vacuum pump:
Manufacturer: AERZEN
Model: GM 2000 CM-C
Speed: 6000 rpm
Voltage: 200-460 V
Frequency (mineral oil/PFPE oil): 100 Hz
Max. pumping speed: 4035 m³/h
Max. speed: 5920 rpm
Motor power S1/S6: 9/5.6 kW
Year of manufacture: 2008
Weight: 345 kg

Dry pump:
Manufacturer: Adixen
Model: BF ADP122
Year of manufacture: 2008
Power: 1.5 kW
Max. pumping speed: 95 m³/h
Max. continuous intake pressure: 50 mbar
Max. exhaust overpressure: 1200 mbar
Cooling water: 60 l/h
Pump speed: 3000-3600 rpm
Operating temperature of the pump: 5 °C to 40 °C
Inlet flange: DN 50 ISO-KF
Exhaust flange: DN 40

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